Electrostatic Chuck (ESC)

APPLICATIONS
•	Electrostatic Chuck (ESC) is the part to fix the wafer in semiconductor manufacturing equipment by the power of static electricity.
•	Generally ESC is classified into monopolar type and bipolar type according to the number of electrodes.
•	It also divied into COLUMB type and JONSEN-RAHBEK type depending on the the size of Dielectric Resistivity.

FEATURES & BENEFITS
•	ESC NEW Design
•	ESC Repair Technology
•	Specialized processing of material
•	Test & Inspection