IMPLANTER SOURCE HOUSING, IHC SOURCE

APPLICATIONS
•	Ion generation device for High Current Implanter.
•	Apply for AMAT HCP/HCS/Trident series.

FEATURES & BENEFITS
•	Excellent Surface Roughness (Ra= 1.2)
•	Complete >10 hrs high pressure test under 7 Kg/cm2
•	Integrated module provides the best material strength
•	Superior welding techniques prolongs the part life-time
•	Plug & play, no additional cooling piping change requirement